Hong, Jongin Choi, Jung Sung Han, Gayoung Kang, Jae Kwang Kim, Chang-Min Kim, Tae Song Yoon, Dae Sung 2024-01-21T02:35:56Z 2024-01-21T02:35:56Z 2021-09-01 2006-07-28 0003-2670 https://pubs.kist.re.kr/handle/201004/135320 Integrated optical devices have been increasingly interested in biosensor applications including environmental pollution, biological process and medical diagnostics. Integrated optics allows high-detection sensitivity to be achieved using optical transduction techniques in a microfluidic format. Among different transduction techniques, a Mach-Zehnder interferometer (MZI) has advantage of its inherent high sensitivity and accuracy. The evanescent wave of an optical waveguide interacts with an adjacent layer, and this can be the basis of the recognition of biomolecules. In recent years, silicon dielectrics as potential materials have been attracted in an integrated optics. The refractive index of these silicon-based materials can be easily adjusted continuously over a wide range between 1.45 (SiO2) and 1.97 (SiO). This comes to be very attractive in terms of design and fabrication of single-mode waveguides. In this article, we tried to realize the Mach-Zehnder interferometer sensor based on silicon oxides, and the refractive index of the oxides was controlled by the oxygen concentration to achieve the single-mode behavior of a total internal reflection (TIR) waveguide. We have performed to verify the feasibility of the MZI sensor for the direct detection of immunoreactions. (c) 2006 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE BV OPTICAL WAVE-GUIDES IMMUNOSENSOR TECHNOLOGY HYDROGEN BIOTIN PECVD A Mach-Zehnder interferometer based on silicon oxides for biosensor applications Article 10.1016/j.aca.2006.04.045 1 ANALYTICA CHIMICA ACTA, v.573, pp.97 - 103 ANALYTICA CHIMICA ACTA 573 97 103 scie scopus 000239524800016 2-s2.0-33746216090 Chemistry, Analytical Chemistry Article; Proceedings Paper OPTICAL WAVE-GUIDES IMMUNOSENSOR TECHNOLOGY HYDROGEN BIOTIN PECVD waveguide biosensor Mach-Zehnder interferometer single-mode immunoreaction