Choi, WC Kim, TG Kim, JS 2024-01-21T03:37:00Z 2024-01-21T03:37:00Z 2021-09-02 2006-02-28 0957-4484 https://pubs.kist.re.kr/handle/201004/135740 We report strong visible photoluminescence (PL) from thermally treated tetra-ethyl-ortho-silicate (TEOS) thin films at room temperature. High-resolution transmission electron microscope (HRTEM) studies showed that the PL originated from nanocrystalline-Si (nc-Si). HRTEM images showed that as-grown TEOS thin films had quasi-static amorphous (QSA) SiO2 phases instead of the typical amorphous (TA) SiO2 phases, and that they divided into small pieces of nc-Si after thermal treatment. In addition, Fourier transform infrared (FTIR) investigations showed that the QSA-SiO2 phases were composed of three types of bonding modes (i.e., Si-O-Si bending, Si-O bending, and Si-O-Si stretching), which play important roles in the formation of the nc-Si at relatively lower annealing temperatures. English IOP PUBLISHING LTD SI LUMINESCENCE Correlation between photoluminescence and Fourier transform infrared spectra in tetra-ethyl-ortho-silicate thin films Article 10.1088/0957-4484/17/4/051 1 NANOTECHNOLOGY, v.17, no.4, pp.1150 - 1153 NANOTECHNOLOGY 17 4 1150 1153 scie scopus 000235896600051 2-s2.0-31944442202 Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Science & Technology - Other Topics Materials Science Physics Article SI LUMINESCENCE nanocrystalline Si Photoluminescence FTIR TEOS