Ko, H Jhin, J Byun, D Lee, J Park, D 2024-01-21T04:05:29Z 2024-01-21T04:05:29Z 2021-09-02 2005-12 1521-3331 https://pubs.kist.re.kr/handle/201004/135967 Metallized polymers were prepared at ambient temperature by an electron-cyclotron-resonance (ECR) chemical vapor deposition system equipped with (-)DC bias from the Cu(hfac)(2)-Ar-H-2 system. X-ray difraction (XRD) results showed that the Cu (111) peaks were clearly observed when H-2 was introduced to the plasma. The surface morphology showed that larger Cu grains were formed in the metal-organic composite films with the introduction of H-2 to the plasma. AES depth profiles showed that H-2 gas introduction to the plasma led to the formation of copper-rich films with a homogeneous composition. Also, the sheet resistance, was strongly dependent on the H2 content of the plasma. This means that hydrogen may lead to both the formation of stable volatile organic compounds and the reduction of copper, which influences both the crystallographic structure and the composition of films. As a result, crystalline copper films with a sheet resistance of 2-3 Omega(2) can be prepared on poly ethylene terephthalate with the addition of H-2 to the plasma. English IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC CHEMICAL-VAPOR-DEPOSITION MICROWAVE PLASMA GROWTH ACETYLACETONATE HEXAFLUOROACETYLACETONATE METALLIZATION PRESSURE ENERGY POWER Copper thin films on PET prepared at ambient temperature by ECR-CVD Article 10.1109/TCAPT.2005.859670 1 IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES, v.28, no.4, pp.781 - 784 IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES 28 4 781 784 scie scopus 000233756200030 2-s2.0-29244468310 Engineering, Manufacturing Engineering, Electrical & Electronic Materials Science, Multidisciplinary Engineering Materials Science Article CHEMICAL-VAPOR-DEPOSITION MICROWAVE PLASMA GROWTH ACETYLACETONATE HEXAFLUOROACETYLACETONATE METALLIZATION PRESSURE ENERGY POWER Cu(hfac)(2) electron-cyclotron-resonance chemical vapor deposition (ECR-CVD) poly ethylene terephthalate (PET) plasma sheet resistance