Park, HY Lee, SR Lee, YJ Cho, BW Cho, WI 2024-01-21T04:14:30Z 2024-01-21T04:14:30Z 2021-09-03 2005-09-15 0254-0584 https://pubs.kist.re.kr/handle/201004/136134 LiCoO2 thin films, which could be used as a cathode material in microbatteries, have been deposited by radio-frequency (rf) magnetron sputtering with various substrate biases as process parameter. The substrate bias during deposition has influenced the electrochemical properties of thin film electrode, and it could be found by charge-discharge test and cyclic voltammogram. We could obtain LiCoO2 thin film cathodes, which can be used directly, without annealing, for the complete thin film battery. The variations of electrochemical properties with substrate bias are related to micro-structural changes due to the ion bombardment, which delivers energy to the growing film. The bias sputtering of LiCoO2 is suggested as the promising method to fabricate thin film microbatteries. (c) 2005 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA ION-BOMBARDMENT LITHIUM COBALT BATTERIES MODEL Bias sputtering and characterization of LiCoO2 thin film cathodes for thin film microbattery Article 10.1016/j.matchemphys.2005.02.024 1 MATERIALS CHEMISTRY AND PHYSICS, v.93, no.1, pp.70 - 78 MATERIALS CHEMISTRY AND PHYSICS 93 1 70 78 scie scopus 000230375200013 2-s2.0-20644451220 Materials Science, Multidisciplinary Materials Science Article ION-BOMBARDMENT LITHIUM COBALT BATTERIES MODEL LiCoO2 thin film cathode bias sputtering microbattery thin film battery