Kim, SH Hwang, IH Jo, KW Yoon, ES Lee, JH 2024-01-21T04:33:57Z 2024-01-21T04:33:57Z 2021-09-01 2005-09 0960-1317 https://pubs.kist.re.kr/handle/201004/136204 A new inchworm micromotor using new electrostatic in-plane twisting microactuators has been designed, fabricated and characterized for nano-resolution manipulators. The proposed twisting mechanism was implemented employing a pair of differential electrostatic actuators with a high stiffness in the driving direction for stable positioning. The electromechanically coupled motion of the voltage-displacement relation was analyzed using a finite element method (FEM), confirming that the twisting actuator makes a tiny step movement efficiently. The proposed actuator was fabricated on a silicon-on-insulator (SOI) wafer with the device footprint of 2.2 x 2.8 mm(2), and its nano-stepping characteristics were measured by an optical interferometer consisting of an integrated micromirror and optical fiber. The fabricated inchworm motor showed a minimum step displacement of 5.2 +/- 3.8 nm (2 sigma) and 4.1 +/- 2.9 nm (2 sigma) for cyclic motion in the +y- and the -y-directions, respectively, with the gripping voltage of 15 V and differential voltage of I V. As a result, the proposed inchworm micromotor could operate with a stroke of 3 mu m and a bi-directional step displacement of less than 10 run. The step displacement is the smallest value of in-plane-type micromotors so far, and its magnitude was controllable up to 120 nm/cycle by changing the differential voltage. English IOP PUBLISHING LTD ACTUATORS DESIGN High-resolution inchworm linear motor based on electrostatic twisting microactuators Article 10.1088/0960-1317/15/9/009 1 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.15, no.9, pp.1674 - 1682 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 15 9 1674 1682 scie scopus 000232234500022 2-s2.0-23944439988 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied Engineering Science & Technology - Other Topics Instruments & Instrumentation Physics Article ACTUATORS DESIGN MEMS microactuator linear motor electro static