Cho, SJ Chung, JW Lee, KR 2024-01-21T04:36:44Z 2024-01-21T04:36:44Z 2021-09-03 2005-08 0925-9635 https://pubs.kist.re.kr/handle/201004/136257 A recently suggested method to measure the elastic modulus of diamond-like carbon (DLC) films was reviewed. This method used a DLC bridge or free overhang which is free from the mechanical constraint of the substrate. Because of the high residual compressive stress of the DLC film, the bridge or the overhang exhibited a sinusoidal displacement on removing the mechanical constraint. Measuring the amplitude and wavelength of the sinusoidal displacement made it possible to measure the strain of the film which occurred by stress relaxation. Combined with independent stress measurement using the laser reflection method, this method allowed the calculation of the biaxial elastic modulus of the DLC film. This method was successfully applied to obtain the elastic properties of various DLC films from polymeric hydrogenated amorphous carbon (a-C:H) to hard tetrahedral amorphous carbon (ta-C) films. Since the substrate is completely removed from the measurement system, this method is insensitive to the mechanical properties of substrate. The mechanical properties of very thin DLC films could be thus measured and then can reveal the structural evolution of a-C:H films during the initial stages of deposition. (c) 2004 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA ELASTIC-MODULUS AMORPHOUS-CARBON RESIDUAL-STRESS THIN-FILM RF-PACVD Characterization of the mechanical properties of diamond-like carbon films Article 10.1016/j.diamond.2004.11.034 1 DIAMOND AND RELATED MATERIALS, v.14, no.8, pp.1270 - 1276 DIAMOND AND RELATED MATERIALS 14 8 1270 1276 scie scopus 000230064000007 2-s2.0-22844436723 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper ELASTIC-MODULUS AMORPHOUS-CARBON RESIDUAL-STRESS THIN-FILM RF-PACVD diamond-like carbon residual compressive stress elastic modulus structural evolution