Kim, HG Ahn, SH Kim, JG Park, SJ Lee, KR 2024-01-21T04:42:02Z 2024-01-21T04:42:02Z 2021-09-01 2005-06-22 0040-6090 https://pubs.kist.re.kr/handle/201004/136352 Si incorporated diamond-like carbon (Si-DLC) films ranging from 0 to 2 at.% contents were deposited on STS 316L substrates for orthopedic implants by means of rf plasma-assisted chemical vapor deposition (rf PACVD) technique, using mixtures of benzene (C6H6) and silane (SiH4) as the precursor gases. This study provides the reliable and quantitative data for assessment of the effect of Si incorporation on wear-corrosion properties in the simulated body fluid environment through the tribological and electrochemical test. It was found that wear and corrosion to resistance of Si-DLC coatings with increasing Si content were improved owing to high sp(3) bonding. (c) 2004 Elsevier B.V All rights reserved. English ELSEVIER SCIENCE SA CHEMICAL-VAPOR-DEPOSITION DLC FILMS COATINGS Effect of Si-incorporation on wear-corrosion properties of diamond-like carbon films Article 10.1016/j.tsf.2004.11.164 1 THIN SOLID FILMS, v.482, no.1-2, pp.299 - 304 THIN SOLID FILMS 482 1-2 299 304 scie scopus 000229681500053 2-s2.0-17644372716 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper CHEMICAL-VAPOR-DEPOSITION DLC FILMS COATINGS diamond-like carbon wear corrosion