Lee, CS Joo, J Han, S Koh, SK 2024-01-21T04:43:24Z 2024-01-21T04:43:24Z 2022-01-25 2005-06 0924-4247 https://pubs.kist.re.kr/handle/201004/136377 Bimorph cantilevers were fabricated using the piezoelectric polymer [poly(vinylidenefluoride), PVDF, beta phase] for the active layers and the highly conducting polymer [poly(3,4-ethylenedioxythiophene)/poly(4-styrenesulfonate), PEDOT/PSS] treated with a dimethyl sulfoxide (DMSO) solvent for the electrodes. The PVDF films were modified so as to have high adhesion at the interface between the PVDF and the PEDOT/PSS (DMSO) film by using an ion-assisted-reaction (IAR) method. A diffusion barrier was formed on the PEDOT/PSS (DMSO) surface after the IAR treatment. The barrier on the IAR treated electrode prevented the epoxy from penetrating into the PEDOT/PSS (DMSO) film, while the adhesive penetrated into the untreated electrode. In order to confirm the penetration of the epoxy adhesive into the IAR treated PEDOT/PSS (DMSO), X-ray photoelectron spectroscopy (XPS) spectra and scanning electron microscopy (SEM) images were analyzed. The surface resistance of the IAR treated electrodes was measured with a 4-point probe. The tip displacement of the cantilevers was measured at a resonance frequency, and the deformation of the PVDF film with the IAR treated PEDOT/PSS (DMSO) electrodes was found to be higher than that with PEDOT/PSS or inorganic electrodes at the same input voltages. The cantilevers made with indium tin oxide (ITO) or platinum (Pt) electrodes became damaged after operating the devices at a high frequency or a high input power. The PVDF cantilevers made with the PEDOT/PSS (DMSO) electrodes were found to be electrically and mechanically durable when operating at both high input voltage and high frequency. (c) 2005 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA An approach to durable PVDF cantilevers with highly conducting PEDOT/PSS (DMSO) electrodes Article 10.1016/j.sna.2005.03.005 1 SENSORS AND ACTUATORS A-PHYSICAL, v.121, no.2, pp.373 - 381 SENSORS AND ACTUATORS A-PHYSICAL 121 2 373 381 N scie scopus 000229731300010 2-s2.0-19744369060 Engineering, Electrical & Electronic Instruments & Instrumentation Engineering Instruments & Instrumentation Article ADHESION ELECTROSTRICTION POLYMERS ENERGY piezoelectric polymer conducting polymer bimorph actuator surface modification diffusion barrier