Kim, SJ Kang, CY Choi, JW Kim, DY Sung, MY Kim, HJ Yoon, SJ 2024-01-21T05:07:56Z 2024-01-21T05:07:56Z 2021-09-03 2005-04-15 0254-0584 https://pubs.kist.re.kr/handle/201004/136543 Characteristics of piezoelectric actuator on Si membrane were investigated. Si membranes were fabricated as a function of size using bulk micromachining method. Bottom electrode Ag-Pd and piezoelectric thick films were fabricated using screen printing method, respectively. Piezoelectric thick films were sintered by rapid thermal annealing (RTA). Top electrodes Pt were deposited by DC sputtering system. We analyzed micro structure by scanning electron microscope (SEM) and investigated dynamic properties by MTI2000. Therefore, piezoelectric thick film on Si membrane had P-r of 15.7 muC cm(-2). The maximum displacement of micro actuator had 0.05 mum. We find the combination of thick film printing and MEMS process to form a Si membrane micro actuator. (C) 2004 Elsevier B.V All rights reserved. English ELSEVIER SCIENCE SA THICK-FILMS Properties of piezoelectric actuator on silicon membrane, prepared by screen printing method Article 10.1016/j.matchemphys.2004.09.038 1 MATERIALS CHEMISTRY AND PHYSICS, v.90, no.2-3, pp.401 - 404 MATERIALS CHEMISTRY AND PHYSICS 90 2-3 401 404 scie scopus 000227142700033 2-s2.0-13144254275 Materials Science, Multidisciplinary Materials Science Review THICK-FILMS piezoelectric actuator bulk micromachining screen printing method