Oh, KH Moon, MW Lee, KR 2024-01-21T05:10:24Z 2024-01-21T05:10:24Z 2021-09-05 2005-04 0255-5476 https://pubs.kist.re.kr/handle/201004/136588 This study presents an evaluation technique of the adhesion energy by using delamination buckle and freehang buckle in thin compressive films. Based on the energy balance criterion, the fundamental adhesion energy has been evaluated with buckling geometries and elastic modulus of film. The freehang buckling by side etching of substrate has been used for evaluating elastic modulus. The adhesion energy change, affected by film thickness and negative bias voltage during deposition process, has been quantitatively estimated. English TRANS TECH PUBLICATIONS LTD CARBON-FILMS MODULUS The evaluation of adhesion energy in thin compressively stressed film by using delamination buckle and freehang buckle Article 10.4028/www.scientific.net/MSF.475-479.3661 1 PRICM 5: THE FIFTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, PTS 1-5, v.475-479, pp.3661 - 3664 PRICM 5: THE FIFTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, PTS 1-5 475-479 3661 3664 scie scopus 000227494704073 2-s2.0-17044392718 Materials Science, Multidisciplinary Metallurgy & Metallurgical Engineering Materials Science Metallurgy & Metallurgical Engineering Article; Proceedings Paper CARBON-FILMS MODULUS delamination buckle freehang buckle interface adhesion thin film compression