Bae, S Hwang, JS Kim, WS Park, HH Kim, TS 2024-01-21T05:10:37Z 2024-01-21T05:10:37Z 2021-09-04 2005-04 1058-4587 https://pubs.kist.re.kr/handle/201004/136592 Direct-patternable lanthanum substituted lead zirconate titanate (PLZT) films were prepared by sol-gel technique using orth-nitrobenzaldehyde as a photosensitive agent. PLZT films with various La concentration were formed on Pt(111)/Ti/SiO2/Si(100) substrate for direct-patterning of PLZT films and ferroelectric properties measurement. A well-defined and direct-patterned PLZT film was obtained and the improvement of leakage current density, fatigue resistance and dielectric constant with increased substitution of La in PLZT film were observed especially with 4 mol% La doped PLZT film. From this result, we confirmed that direct-patternable PLZT film is suitable for application in micro device. English TAYLOR & FRANCIS LTD THIN-FILMS ELECTRICAL-PROPERTIES TITANATE CAPACITORS Development of sol-gel precursor system for direct-patternable PZT ferroelectric films containing La as a dopant Article 10.1080/10584580590897326 1 INTEGRATED FERROELECTRICS, v.69, pp.83 - 91 INTEGRATED FERROELECTRICS 69 83 91 scie scopus 000226933000010 2-s2.0-33644773509 Engineering, Electrical & Electronic Physics, Applied Physics, Condensed Matter Engineering Physics Article; Proceedings Paper THIN-FILMS ELECTRICAL-PROPERTIES TITANATE CAPACITORS sol-gel direct-patterning PLZT fatigue