Wang, AY Ahn, HS Lee, KR Ahn, JP 2024-01-21T05:13:29Z 2024-01-21T05:13:29Z 2021-09-03 2005-03-14 0003-6951 https://pubs.kist.re.kr/handle/201004/136646 Unusual stress behavior was observed in W-incorporated hydrogenated amorphous carbon films prepared by a hybrid process composed of ion-beam deposition and magnetron sputtering. As the tungsten concentration increased from 0 to 2.8 at.%, the residual compressive stress decreased by 50%, without significant deterioration in the mechanical properties. This was followed by a rapid increase and a gradual decrease in the residual stress with increasing W concentration. High-resolution transmission electron microscopy analysis and first-principle calculations show that the reduced directionality of the W-C bonds in the W-incorporated amorphous carbon matrix relaxes the stress caused by the distorted bonds. (C) 2005 American Institute of Physics. English AMER INST PHYSICS DIAMOND-LIKE CARBON CERAMIC NANOCOMPOSITE COATINGS MECHANICAL-PROPERTIES THIN-FILMS MICROSTRUCTURE HYDROCARBON DEPOSITION ENERGY Unusual stress behavior in W-incorporated hydrogenated amorphous carbon films Article 10.1063/1.1883328 1 APPLIED PHYSICS LETTERS, v.86, no.11 APPLIED PHYSICS LETTERS 86 11 scie scopus 000228050700024 2-s2.0-17944379512 Physics, Applied Physics Article DIAMOND-LIKE CARBON CERAMIC NANOCOMPOSITE COATINGS MECHANICAL-PROPERTIES THIN-FILMS MICROSTRUCTURE HYDROCARBON DEPOSITION ENERGY diamond-like carbon stress w incorporation