Shin, SD Kim, DW Kim, DK Kim, DY 2024-01-21T05:34:20Z 2024-01-21T05:34:20Z 2021-09-01 2005-02-01 0022-0248 https://pubs.kist.re.kr/handle/201004/136752 In this study. the microstructure and property of poly-Si film, deposited using hot wire chemical vapor deposition (HWCVD) were investigated. A consequence of the low a-Si content in the poly-Si film was crystallites with well developed facets. The crystallite morphology was rhombic pyramidal while EBSD analysis revealed the existence of (1 1 1) contact twin planes. The facets of the rhombic pyramidal crystallites were based oil {3 2 0} and {3 2 0}* planes, which have Sigma3 twin relationship with respect to (1 1 1) contact twin plane. (C) 2004 Published by Elsevier B.V. English ELSEVIER SCIENCE BV CHEMICAL-VAPOR-DEPOSITION FLATTENED DIAMOND CRYSTALS HOT-WIRE CVD MICROCRYSTALLINE SILICON SOLAR-CELLS SI MECHANISM Crystal growth in the low-temperature deposition of polycrystalline silicon thin film Article 10.1016/j.jcrysgro.2004.10.151 1 JOURNAL OF CRYSTAL GROWTH, v.274, no.3-4, pp.347 - 354 JOURNAL OF CRYSTAL GROWTH 274 3-4 347 354 scie scopus 000226704900003 Crystallography Materials Science, Multidisciplinary Physics, Applied Crystallography Materials Science Physics Article CHEMICAL-VAPOR-DEPOSITION FLATTENED DIAMOND CRYSTALS HOT-WIRE CVD MICROCRYSTALLINE SILICON SOLAR-CELLS SI MECHANISM EBSD rhombic pyramid twin HWCVD poly-Si