Anh, NC Shin, HJ Kim, KT Han, YH Moon, S 2024-01-21T06:02:20Z 2024-01-21T06:02:20Z 2021-09-05 2004-12 0374-4884 https://pubs.kist.re.kr/handle/201004/136983 A surface micromachining uncooled infrared detector with an optimized vanadium-alloy oxide layer was fabricated, based on low-temperature annealing of a V-W alloy oxide (VWOx) layer. Vanadium oxide is a promising material for an uncooled bolometer, due to its high temperature coefficient of resistance (TCR) at room temperature. An infrared active layer is needed to accompany with the reflective layer to enhance its IR, absorption. Test bolometers were successfully fabricated and then radiated by an IR. laser source at various power levels with a chopper in a, frequency range of 1 similar to 450 Hz. The responsivity and noise of the test; bolometer was measured and the detectivity was calculated. From the result, the calculated detectivity is 1.1 x 10(7) CmHz(1/2)W(-1). The bolometer detectivity can be increased further if the noise in the device is reduced. English KOREAN PHYSICAL SOC ARRAY Characterization of uncooled bolometer with vanadium tungsten oxide infrared-active layer Article 1 JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.45, pp.S921 - S923 JOURNAL OF THE KOREAN PHYSICAL SOCIETY 45 S921 S923 scie scopus kci ART001195172 000226119400108 2-s2.0-12744280155 Physics, Multidisciplinary Physics Article; Proceedings Paper ARRAY uncooled bolometer vanadium oxide thermal absorber