Hwang, HS Oh, SH Kim, HS Cho, WI Cho, BW Lee, DY 2024-01-21T06:05:33Z 2024-01-21T06:05:33Z 2021-09-04 2004-11-30 0013-4686 https://pubs.kist.re.kr/handle/201004/137042 The effect of silver co-sputtering on the characteristics of amorphous V2O5 films, grown by dc reactive sputtering, is investigated. The co-sputtering process influences the growth mechanism as well as the characteristics of the V2O5 films. X-ray diffraction (XRD), Inductively coupled plasma-atomic emission spectrometry (ICP-AES), field emission-scanning electron microscopy (FE-SEM), Fourier transform infrared spectrometry (FT-IR) and X-ray photoelectron spectrometry (XPS) results indicate that the microstructure of the V2O5 films is affected by the rf power of the co-sputtered silver. In addition, an all-solid-state thin film battery with full cell structure of Li/LiPON/AgxV2O5/Pt has been fabricated. It is found that the silver co-sputtered V2O5 cathode film exhibits better cycle performance than an undoped one. (C) 2004 Elsevier Ltd. All rights reserved. English PERGAMON-ELSEVIER SCIENCE LTD RECHARGEABLE LITHIUM BATTERIES MICROBATTERIES INTERCALATION INSERTION Characterization of Ag-doped vanadium oxide (AgxV2O5) thin film for cathode of thin film battery Article 10.1016/j.electacta.2004.04.050 1 ELECTROCHIMICA ACTA, v.50, no.2-3, pp.485 - 489 ELECTROCHIMICA ACTA 50 2-3 485 489 scie scopus 000225261000047 2-s2.0-9444227073 Electrochemistry Electrochemistry Article; Proceedings Paper RECHARGEABLE LITHIUM BATTERIES MICROBATTERIES INTERCALATION INSERTION silver co-sputtering amorphous vanadium oxide cathode thin film battery