Park, SJ Lee, KR Ko, DH 2024-01-21T06:08:41Z 2024-01-21T06:08:41Z 2021-09-05 2004-11 0301-679X https://pubs.kist.re.kr/handle/201004/137101 Tribological behavior of hydrogenated diamond-like carbon (DLC) films and Si incorporated DLC (Si-DLC) films deposited on Si (100) wafer by r.f.-plasma assisted chemical vapor deposition were investigated by ball-on-disk type tribometry in various environments. The friction tests were performed in ambient air of relative humidity ranging from 0% to 90% or dry oxygen environment. We focused on the tribochemical reactions by analyzing chemical composition, chemical bond structure and agglomerated shape of the debris. High and unstable friction behavior was observed in both humid air and dry oxygen environments. In these environments, Auger spectrum analysis showed that the debris contained large amounts of Fe. Significant incorporation of Fe in the debris resulted from the wear of the steel ball, which might be enhanced by the surface oxidation of the ball. These results show that the humidity dependence of friction coefficient is not an inherent tribological property of DLC films but results from the surface reaction of the steel ball in humid environments. Two possible reasons for the Fe rich debris affecting the friction behavior are presented. Reduced dependence of the friction coefficient on the relative humidity observed for Si-DLC films is discussed in terms of the two possible reasons. (C) 2004 Elsevier Ltd. All rights reserved. English ELSEVIER SCI LTD CHEMICAL-VAPOR-DEPOSITION TRIBOLOGICAL BEHAVIOR DLC COATINGS MECHANICAL-PROPERTIES RELATIVE-HUMIDITY WEAR PROPERTIES SLIDING WEAR THIN-FILMS SILICON FRICTION Tribochemical reaction of hydrogenated diamond-like carbon films: a clue to understand the environmental dependence Article 10.1016/j.triboint.2004.07.008 1 TRIBOLOGY INTERNATIONAL, v.37, no.11-12, pp.913 - 921 TRIBOLOGY INTERNATIONAL 37 11-12 913 921 scie scopus 000225003600008 2-s2.0-7644232159 Engineering, Mechanical Engineering Article CHEMICAL-VAPOR-DEPOSITION TRIBOLOGICAL BEHAVIOR DLC COATINGS MECHANICAL-PROPERTIES RELATIVE-HUMIDITY WEAR PROPERTIES SLIDING WEAR THIN-FILMS SILICON FRICTION diamond-like carbon tribochemical reaction humidity dependence Fe rich oxide debris counterface materials