Lee, CS Lee, KR Suh, SH 2024-01-21T06:38:13Z 2024-01-21T06:38:13Z 2021-09-05 2004-08 0267-0836 https://pubs.kist.re.kr/handle/201004/137360 Optimisation of the mechanical properties of a tetrahedral amorphous carbon (ta-C) thin film was attempted by nanostructuring. In this study, nanoscale multilayer films of ta-C and Si incorporated ta-C:Si layers were prepared. The residual compressive stress of the multilayer films decreased drastically without a decrease in the hardness and elastic modulus, compared with the monolithic films. No significant change in the atomic bond structure was observed in Raman spectral analysis. The present results thus provide a new possibility of application of the ta-C film in harsh environments. English TAYLOR & FRANCIS LTD AMORPHOUS-CARBON FILMS CATHODIC ARC ION ENERGY VACUUM-ARC NANOINDENTATION Mechanical property optimisation of materials by nanostructuring: reduction of residual compressive stress in ta-C film Article 10.1179/026708304225019777 1 MATERIALS SCIENCE AND TECHNOLOGY, v.20, no.8, pp.993 - 995 MATERIALS SCIENCE AND TECHNOLOGY 20 8 993 995 scie scopus 000223912800012 2-s2.0-4344671735 Materials Science, Multidisciplinary Metallurgy & Metallurgical Engineering Materials Science Metallurgy & Metallurgical Engineering Article; Proceedings Paper AMORPHOUS-CARBON FILMS CATHODIC ARC ION ENERGY VACUUM-ARC NANOINDENTATION tetrahedral amorphous carbon thin film nanostructure mechanical properties