정귀상 김재민 윤석진 정순종 송재성 2024-01-21T07:02:26Z 2024-01-21T07:02:26Z 2021-09-06 2004-06 1225-5475 https://pubs.kist.re.kr/handle/201004/137523 This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramicactuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuatordie and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement,respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimizedconditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was alsoanodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was alsobonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 Vwith a 50% duty cycle, maximum non-linearity was 2.24% FS and leak rate was 3.03 10-8 pa m3/cm2. Therefore, thefabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and airtransportation industry. 한국센서학회 적층형 압전밸브의 설계, 제작 및 특성 Design, Fabrication and Characteristics of a MCA Valve Article 2 센서학회지, v.13, no.3, pp.230 - 235 센서학회지 13 3 230 235 kci other ART001146548 piezoelectric valve MCA seat die actuator die piezoelectric valve MCA seat die actuator die