Kim, HJ Jang, SH Oh, KH Kim, TS Kim, KY 2024-01-21T07:03:56Z 2024-01-21T07:03:56Z 2021-09-02 2004-06 1862-6300 https://pubs.kist.re.kr/handle/201004/137551 Manipulation and detection of magnetic beads on a chip open up new perspectives for analysis of magnetically labeled specimens in biological and medical applications. This work has studied to achieve the high sensitive spin-valve (SV) sensor detecting the stray field from a spherical-shaped superparamagnetic bead magnetized by external field. First of all, SV structures of Ta(50)/NiFe(45)/CoFe(15)/Cu(26)/CoFe(40)/IrMn(150)/Ta(50) [unit of () is Angstrom] with 8 - 9% magnetoresistive ratio (MR) were deposited on substrate Si/SiO2(1500) by UHV magnetron sputter system. SV sensor was fabricated through photolithographic techniques and ion milling processes. The working of sensor was confirmed by obtaining the output signal as a function of sense current under the external field parallel to magnetization direction of pinned layer. The sensitivity of the fabricated SV sensor was about 0.3%/Oe (sense current 10 mA). Sensor signal (DeltaV) output of 2 mV was obtained for 2.8 mum magnetic beads positioned over the SV sensor using an external in-plane field and 10 mA sense current. (C) 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. English WILEY-V C H VERLAG GMBH MAGNETORESISTIVE SENSORS The fabrication of high sensitive spin-valve sensor for magnetic bead detection Article 10.1002/pssa.200304652 1 PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, v.201, no.8, pp.1961 - 1964 PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE 201 8 1961 1964 scie scopus 000222401400086 2-s2.0-3142696357 Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper MAGNETORESISTIVE SENSORS spin valve sensor bio sensor magnetic bead