Lee, CS Shin, JK Eun, KY Lee, KR Yoon, KH 2024-01-21T07:06:20Z 2024-01-21T07:06:20Z 2021-09-02 2004-05-01 0021-8979 https://pubs.kist.re.kr/handle/201004/137595 Defect density of tetrahedral amorphous carbon (ta-C) film prepared by filtered vacuum arc process was investigated in a wide range of fraction of sp(3) hybridized bond. We could observe a close relationship between unpaired spin density measured by electron spin resonance spectroscopy and their atomic bond structure: the defect density was proportional to the content of sp(3) hybridized bond in the film. Near edge x-ray absorption fine structure analysis further showed that the content of the surface C-H bonds presumably due to the absorption of hydrocarbon to the surface dangling bond also increased with increasing content of sp(3) hybridized bond. The observed dependence was discussed in terms of the degree of clustering or pairing of the isolated sp(2) sites. (C) 2004 American Institute of Physics. English AMER INST PHYSICS CHEMICAL-VAPOR-DEPOSITION ABSORPTION FINE-STRUCTURE DIAMOND-LIKE CARBON CATHODIC ARC ION ENERGY Defect density and atomic bond structure of tetrahedral amorphous carbon (ta-C) films prepared by filtered vacuum arc process Article 10.1063/1.1699481 1 JOURNAL OF APPLIED PHYSICS, v.95, no.9, pp.4829 - 4832 JOURNAL OF APPLIED PHYSICS 95 9 4829 4832 scie scopus 000220875400045 2-s2.0-2442683283 Physics, Applied Physics Article CHEMICAL-VAPOR-DEPOSITION ABSORPTION FINE-STRUCTURE DIAMOND-LIKE CARBON CATHODIC ARC ION ENERGY ta-C defect NEXAFS ESR structure