정귀상 윤석진 김재민 2024-01-21T07:07:04Z 2024-01-21T07:07:04Z 2021-09-06 2004-05 1226-7945 https://pubs.kist.re.kr/handle/201004/137609 We report on the development of a piezoelectric valve that is designed to have a high reliability for fluid control systems, such as mass flow control, transportation and chemical analysis. The valve was fabricated using a MCA(multilayer ceramic actuator), which has a low consumption power, high resolution and accurate control. The fabricated valve is composed of MCA, a valve actuator die and an seat die. The design of the actuator die was done by FEM(finite element method) modeling, respectively. And, the valve seat die with 6 trenches was made, and the actuator die, which possible to optimize control to MCA, was fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS(poly- dimethylsiloxane) sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and stainless steel package. The flow rate was 9.13 sccm at a supplied voltage of 100 V with a 50 % duty ratio and non-linearity was 2.24 % FS. From these results, the fabricated MCA valve is suitable for a variety of flow control equipments, a medical bio-system, semiconductor fabrication process, automobile and air transportation industry with low cost, batch process and mass production. 한국전기전자재료학회 적층형 세라믹 엑추에이터를 이용한 MEMS용 압전밸브의 제작 및 특성 Fabrication and Characteristics of a Piezoelectric Valve for MEMS using a Multilayer Ceramic Actuator Article 2 전기전자재료학회논문지, v.17, no.5, pp.515 - 520 전기전자재료학회논문지 17 5 515 520 kci ART000937476 Piezoelectric Valve MCA Seat die Actuator die Piezoelectric Valve MCA Seat die Actuator die