Kim, DH Kim, B Park, JO 2024-01-21T07:08:20Z 2024-01-21T07:08:20Z 2021-09-02 2004-05 1226-4865 https://pubs.kist.re.kr/handle/201004/137633 The nanoscale sensing and manipulation have become a challenging issue in micro/nanorobotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in microrobotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a microrobotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation. English KOREAN SOC MECHANICAL ENGINEERS MICROMANIPULATION NANOROBOTICS MICROSCOPE Implementation of a piezoresistive MEMS cantilever for nanoscale force measurement in micro/nano robotic applications Article 1 KSME INTERNATIONAL JOURNAL, v.18, no.5, pp.789 - 797 KSME INTERNATIONAL JOURNAL 18 5 789 797 scie scopus kci ART001093744 000221385500007 2-s2.0-10044268742 Engineering, Mechanical Engineering Article MICROMANIPULATION NANOROBOTICS MICROSCOPE piezoresistive MEMS cantilever atomic force microscope (AFM) microrobotics micro force sensing van der Waals force micro/nano -manipulation