Lee, JH Hwang, KS Kim, TS Seong, JW Yoon, KH Ahn, SY 2024-01-21T07:08:36Z 2024-01-21T07:08:36Z 2021-09-02 2004-05 0374-4884 https://pubs.kist.re.kr/handle/201004/137638 Adhesion of gold on parylene C (Pa-c) is a, major hurdle in achieving reliable and durable performance for biosensor application due to the hydrophobicity of Pa-c. It is, therefore, imperative to put efforts to improve adhesion between An and Pa-c. In this reseach, oxygen plasma treatment for adhesion improvement was performed on Pa-c surfaces at various plasma powers and times. To analyze the relation of surface energy and roughness to adhesion promotion, we used several techniques such as contact-angle, surface-energy, surface-roughness, and adhesion analyses. As the oxygen plasma power and time were increased, the surface roughness of Pa-c increased. Also, Au films had larger and more uniform grain sizes as the oxygen plasma power and time were increased. Untreated surfaces revealed a contact angle of 108degrees, but the contact angle drastically decreased in the initial stage of oxygen plasma treatment and slowly decreased with increasing power and time to values of 27.3 and 34, respectively. From the adhesion analysis, adhesion was improved as the plasma power or time was increased. The improvement of adhesion is related to an increase in roughness as well as carbonyl groups. English KOREAN PHYSICAL SOC PARYLENE-N SURFACE FILMS STABILITY ENERGY Effect of oxygen plasma treatment on adhesion improvement of Au deposited on Pa-c substrates Article 1 JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.44, no.5, pp.1177 - 1181 JOURNAL OF THE KOREAN PHYSICAL SOCIETY 44 5 1177 1181 scie scopus kci 000221461000031 2-s2.0-2942673234 Physics, Multidisciplinary Physics Article; Proceedings Paper PARYLENE-N SURFACE FILMS STABILITY ENERGY oxygen plasma parylene Au adhesion surface roughness surface energy