Kim, DH Kim, B Kang, H 2024-01-21T07:09:33Z 2024-01-21T07:09:33Z 2021-09-01 2004-05 0946-7076 https://pubs.kist.re.kr/handle/201004/137656 This paper presents the design, fabrication, and calibration of a piezoelectric polymer-based sensorized microgripper. Electro discharge machining technology is employed to fabricate the superelastic alloy-based microgripper. It was experimentally tested to show the improvement of mechanical performance. For integration of force sensor in the microgripper, the sensor design based on the piezoelectric polymer polyvinylidene fluoride (PVDF) film and fabrication process are presented. The calibration and performance test of the force sensor-integrated microgripper are experimentally carried out. The force sensor-integrated microgripper is applied to fine alignment tasks of micro opto-electrical components. Experimental results show that it can successfully provide force feedback to the operator through the haptic device and play a main role in preventing damage of assembly parts by adjusting the teaching command. English SPRINGER HEIDELBERG GRIPPER SYSTEM Development of a piezoelectric polymer-based sensorized microgripper for microassembly and micromanipulation Article 10.1007/s00542-003-0330-y 1 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, v.10, no.4, pp.275 - 280 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 10 4 275 280 scie scopus 000222060400004 2-s2.0-3042688546 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Engineering Science & Technology - Other Topics Materials Science Physics Article GRIPPER SYSTEM microassembly micromanipulation microgripper force sensing piezoelectric polymer PVDF