오영주 정순효 2024-01-21T07:32:31Z 2024-01-21T07:32:31Z 2021-09-06 2004-03 1225-0562 https://pubs.kist.re.kr/handle/201004/137800 A numerical simulation based on the finite element method is used to investigate the effect of a reciprocal paddle on the uniformity of deposition rates at a patterned electrode. The calculated deposition rates agreed well with the measured values. The influences of the paddle velocity, the gap between cathodes and paddles, anode size and the distance between the anode and cathode have been studied. The optimum conditions on the paddle and geometric factors for electrodeposit uniformity could be obtained. 한국재료학회 왕복패들이 패턴화된 음극의 전착균일성에 미치는 영향 The Effect of a Reciprocating Paddle on the Electrodeposit Uniformity of Patterned Cathodes Article 2 한국재료학회지, v.14, no.3, pp.196 - 202 한국재료학회지 14 3 196 202 kci ART000931523 Finite element method Electrodeposition Uniformity of current distribution Reciprocal paddle Finite element method Electrodeposition Uniformity of current distribution Reciprocal paddle