윤영수 김태송 최원국 2024-01-21T07:35:35Z 2024-01-21T07:35:35Z 2022-01-10 2004-02 https://pubs.kist.re.kr/handle/201004/137857 Structural and Electrical properties of WOx Thin Films Deposited by Direct Current Reactive Sputtering for NOx Gas Sensor Article 3 Journal of The Korean Ceramic Society, v.41, no.2, pp.97 - 101 Journal of The Korean Ceramic Society 41 2 97 101 WOx Semiconductor type sensor Nox Sensitivity Thin film