Jung, YS 2024-01-21T07:37:30Z 2024-01-21T07:37:30Z 2021-09-02 2004-02 0038-1098 https://pubs.kist.re.kr/handle/201004/137893 In this paper. the variation of the optical constants of tin-doped indium oxide thin films during thermal treatment was explored using spectroscopic ellipsometry based on appropriate analysis models combining a Drude absorption edge and Lorentz oscillators. It was found that the refractive indices and the extinction coefficients show different behaviors depending on depth, thermal treatment time and temperature. The optical constants varied more abruptly in the lower part of the films, which confirms the model that crystallization starts from the film-substrate interface. Hall measurement showed that the significant increase in the extinction coefficients in the near infrared range is due to the increased number of free electrons. (C) 2003 Elsevier Ltd. All rights reserved. English PERGAMON-ELSEVIER SCIENCE LTD TEMPERATURE DEPOSITION NITROGEN LAYERS A spectroscopic ellipsometry study on the variation of the optical constants of tin-doped indium oxide thin films during crystallization Article 10.1016/j.ssc.2003.11.044 1 SOLID STATE COMMUNICATIONS, v.129, no.8, pp.491 - 495 SOLID STATE COMMUNICATIONS 129 8 491 495 scie scopus 000188927800002 2-s2.0-0346308508 Physics, Condensed Matter Physics Article TEMPERATURE DEPOSITION NITROGEN LAYERS thin films optical properties light absorption and reflection