Kang, M Kim, H Han, BW Suh, J Park, J Choi, M 2024-01-21T07:38:53Z 2024-01-21T07:38:53Z 2021-09-01 2004-02 0167-9317 https://pubs.kist.re.kr/handle/201004/137918 Patterned deposition of nanoparticles is prerequisite for the application of unique property of nanoparticles on future electronic devices. This study describes nanoparticle pattern deposition by means of particle mobility control and charge pattern transfer technique. Singly charged monodisperse nanoparticles were generated in gas phase by a series of aerosol generation, electric mobility classification and transport processes, and then, they were deposited on the substrates patterned with charges through a flexible polydimethyl siloxane (PDMS) stamp. The PDMS stamps were metal-coated by a sputter to reduce buckles on the surface of the stamps. Nanoparticle patterns were successfully achieved with the resolution of 500 nm and they were nearly consistent with those of the stamps. (C) 2003 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE BV PARTICLES Nanoparticle pattern deposition from gas phase onto charged flat surface Article 10.1016/j.mee.2003.11.007 1 MICROELECTRONIC ENGINEERING, v.71, no.2, pp.229 - 236 MICROELECTRONIC ENGINEERING 71 2 229 236 scie scopus 000188297000015 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Optics Physics, Applied Engineering Science & Technology - Other Topics Optics Physics Article PARTICLES nanopatterning nanoparticle soft lithography nanostructure nanofabrication contact charging particle deposition