Jung, YS Seo, HY Lee, DW Jeon, DY 2024-01-21T08:02:45Z 2024-01-21T08:02:45Z 2021-09-03 2003-11-24 0040-6090 https://pubs.kist.re.kr/handle/201004/138075 Amorphous or crystalline indium zinc oxide (IZO) thin films, which are highly transparent and conducting, were deposited by DC magnetron sputtering. X-Ray diffraction technique was used for analyzing microstructures of the films, and also differential thermal analysis was performed for observing their crystallization behavior. The IZO thin films prepared were crystallized at much higher temperature than ITO films were. The crystallized samples showed (222) preferred orientations. By varying process parameters, the optimum conditions for the highest electrical conductivity and optical transmittance, and the lowest surface roughness were found. The resistivity of IZO films decreased as the deposition temperature increased until 250 degreesC, but sharp rise occurred at or above 300 degreesC. The extinction coefficients diminished in the films prepared with the conditions of higher deposition temperature, sputtering gas of light mass, and heat treatment. However, excessive amount of oxygen flow during deposition brought about the increase of the extinction coefficients. The variations of extinction coefficients mainly influenced the transmittance of the samples. On the basis of X-ray photoelectron spectroscopy analysis, atomic force microscopy measurement, spectroscopic ellipsometry and spectrophotometer measurement, several characteristics of IZO thin films were discussed comparing with those of ITO thin films. Very low surface roughness of IZO thin films could satisfy the requirement for organic light-emitting diode. (C) 2003 Elsevier Science B.V All rights reserved. English ELSEVIER SCIENCE SA PULSED-LASER DEPOSITION TRANSPARENT CONDUCTIVE FILMS OPTICAL-PROPERTIES ZNO FILMS TIN MICROSTRUCTURE TEMPERATURE PRESSURE Influence of DC magnetron sputtering parameters on the properties of amorphous indium zinc oxide thin film Article 10.1016/j.tsf.2003.09.014 1 THIN SOLID FILMS, v.445, no.1, pp.63 - 71 THIN SOLID FILMS 445 1 63 71 scie scopus 000186674900011 2-s2.0-0242366728 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article PULSED-LASER DEPOSITION TRANSPARENT CONDUCTIVE FILMS OPTICAL-PROPERTIES ZNO FILMS TIN MICROSTRUCTURE TEMPERATURE PRESSURE indium oxide zinc oxide electrical properties and measurements optical properties