윤석진 최지원 김상종 유연태 김현재 2024-01-21T08:04:24Z 2024-01-21T08:04:24Z 2022-01-10 2003-11 https://pubs.kist.re.kr/handle/201004/138106 Design of shaking beam for piezoelectric linear ultrasonic motor Article 3 한국세라믹학회지 = Journal of The Korean Ceramic Society, v.v. 40, no.no. 11, pp.1062 - 1066 한국세라믹학회지 = Journal of The Korean Ceramic Society v. 40 no. 11 1062 1066 piezoelectric actuator linear motor shaking beam FEM Longitudinal and flexural vibrations