Lee, CS Kim, TY Lee, KR Ahn, JP Yoon, KH 2024-01-21T08:06:09Z 2024-01-21T08:06:09Z 2021-09-03 2003-10-28 0009-2614 https://pubs.kist.re.kr/handle/201004/138139 Recently, structural manipulation of tetrahedral amorphous carbon (ta-C) film at the nanometer scale has attracted much attention. We demonstrate a novel method to obtain a nanocomposite film where nanoscale columns of graphitic phase are embedded in a tetrahedral amorphous carbon matrix. When using a Si substrate with nanosized Ni dots on the surface, graphitic columns grew selectively on the Ni dots, while a dense ta-C film was deposited on the bare Si surface. The growth of the graphitic columns is closely related to the nanosized Ni dots that catalyze the graphitic-carbon formation in a filtered vacuum arc deposition condition. (C) 2003 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE BV AMORPHOUS-CARBON FILMS DIAMOND-LIKE CARBON ION ENERGY STRESS COATINGS Nanocomposite ta-C films prepared by the filtered vacuum arc process using nanosized Ni dots on a Si substrate Article 10.1016/j.cplett.2003.09.081 1 CHEMICAL PHYSICS LETTERS, v.380, no.5-6, pp.774 - 779 CHEMICAL PHYSICS LETTERS 380 5-6 774 779 scie scopus 000186265500042 2-s2.0-0142186224 Chemistry, Physical Physics, Atomic, Molecular & Chemical Chemistry Physics Article AMORPHOUS-CARBON FILMS DIAMOND-LIKE CARBON ION ENERGY STRESS COATINGS