Jeon, YA No, KS Kim, JS Yoon, YS 2024-01-21T08:34:02Z 2024-01-21T08:34:02Z 2021-09-03 2003-08 1598-9623 https://pubs.kist.re.kr/handle/201004/138376 ZnO films for electronic applications were deposited by radio-frequency (rf) sputtering onto various metal bottom electrodes (Pt/Ti, W Ni) to investigate such structural properties as crystallinity and surface morphology. The crystallinity, surface morphology and composition of the as-deposited films were studied using X-ray diffraction (XRD), scanning electron microscopy (SEM) and Rutherford back-scattering spectrometry (RBS), respectively. The preferred orientation and surface morphologies were strongly influenced by the type of bottom electrodes. The ZnO films with (200) texturing deposited on Pt/Ti/SiO2/Si showed a smoother and smaller grain size than those deposited on W and Ni. The ZnO films on Pt and W electrodes exhibited compressive residual stress. English KOREAN INST METALS MATERIALS ZINC-OXIDE Characteristics of ZnO thin film deposited on various metal bottom electrodes Article 10.1007/BF03027192 1 METALS AND MATERIALS INTERNATIONAL, v.9, no.4, pp.383 - 387 METALS AND MATERIALS INTERNATIONAL 9 4 383 387 scie scopus kci other 000185012100009 2-s2.0-1842472245 Materials Science, Multidisciplinary Metallurgy & Metallurgical Engineering Materials Science Metallurgy & Metallurgical Engineering Article ZINC-OXIDE ZnO thin film various metal bottom electrodes radio-frequency (rf) sputtering