Yoon, JK Lee, JK Lee, KH Byun, JY Kim, GH Hong, KT 2024-01-21T08:36:49Z 2024-01-21T08:36:49Z 2021-09-03 2003-07 0966-9795 https://pubs.kist.re.kr/handle/201004/138425 The microstructures and growth kinetics of the Mo5Si3 and Mo3Si layers in the MoSi2/Mo diffusion couple was investigated using optical microscopy, field-emission scanning electron microscopy, electron probe microanalyzer, and cross-sectional transmission electron microscopy. The MoSi2/Mo diffusion couple was made by chemical vapor deposition CVD of Si on a Mo substrate at 1100 degreesC and annealed at temperatures between 1250 and 1600 degreesC in an Ar atmosphere. Simultaneous parabolic growth of the Mo5Si3 and Mo3Si layers was observed at the early annealing stage of the MoSi2/Mo diffusion couple. From the marker experiments using ZrO2 particles, the growth mechanism of the Mo5Si3 and Mo3Si layers and the dominant diffusion element in each phase were revealed. The difference in the growth rates of Mo3Si layer between the MoSi2/Mo diffusion couple and the Mo5Si3/Mo diffusion couple was explained by a multiple layer growth model. (C) 2003 Elsevier Science Ltd. All rights reserved. English ELSEVIER SCI LTD SILICIDE COATINGS MOLYBDENUM BEHAVIOR CREEP Microstructure and growth kinetics of the Mo5Si3 and Mo3Si layers in MoSi2/Mo diffusion couple Article 10.1016/S0966-9795(03)00068-2 1 INTERMETALLICS, v.11, no.7, pp.687 - 696 INTERMETALLICS 11 7 687 696 scie scopus 000184264700008 2-s2.0-0038803795 Chemistry, Physical Materials Science, Multidisciplinary Metallurgy & Metallurgical Engineering Chemistry Materials Science Metallurgy & Metallurgical Engineering Article SILICIDE COATINGS MOLYBDENUM BEHAVIOR CREEP molybdenum silicides diffusion crystal growth microstructure