Kim, HK Seong, TY Lee, SM Yoon, YS 2024-01-21T08:39:35Z 2024-01-21T08:39:35Z 2022-01-11 2003-06 1598-9623 https://pubs.kist.re.kr/handle/201004/138474 We report on the preparation of an all solid-state thin film micro-supercapacitor using RuO2 electrode film and LiPON electrolyte film on a Pt/Ti/Si substrate with dual target dc and rf reactive sputtering. Room temperature charge-discharge measurements based on a symmetrical RuO2/LiPON/RuO2 structure clearly demonstrated the cyclibility dependence of the RuO2 electrode on the microstructure. Using both glancing angle X-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the characteristics of the thin film supercapacitor are dependent on the microstructure of the RuO2 film. In addition, high-resolution electron transmission microscopy (HREM) analysis after cycling demonstrates that the interface layer formed by interfacial reaction between the LiPON and RuO2 acts as the main factor in the degradation of the performance of the thin film micro-supercapacitor. English KOREAN INST METALS MATERIALS RUTHENIUM OXIDE OHMIC CONTACTS Charge-discharge induced phase transformation of RuO2 electrode for thin film supercapacitor Article 10.1007/BF03027042 1 METALS AND MATERIALS INTERNATIONAL, v.9, no.3, pp.239 - 246 METALS AND MATERIALS INTERNATIONAL 9 3 239 246 scie scopus kci other 000183669000004 2-s2.0-1842455749 Materials Science, Multidisciplinary Metallurgy & Metallurgical Engineering Materials Science Metallurgy & Metallurgical Engineering Article; Proceedings Paper RUTHENIUM OXIDE OHMIC CONTACTS RuO2 LiPON transmission electron microscope (TEM) supercapacitor glancing angle X-ray diffraction (GXRD) cyclibility