Kim, HK Cho, SH Ok, YW Seong, TY Yoon, YS 2024-01-21T09:02:55Z 2024-01-21T09:02:55Z 2021-09-03 2003-05 1071-1023 https://pubs.kist.re.kr/handle/201004/138622 We investigate an all solid-state thin-film microsupercapacitor (TFSC) fabricated with tungsten cosputtered ruthenium oxide electrodes (W-RuO2) and LiPON electrolyte. It is shown that the room-temperature charge-discharge behavior of the TFSC is similar to that of a bulk-type supercapacitor. It is also shown that the W-RuO2-based TFSC exhibits a higher discharge specific capacitance and more stable cyclibility, compared with those of the RuO2-based TFSC. Based on the pseudocapacitance of the oxide electrodes, the cycling behavior of the TFSCs and tungsten cosputtering effect on the electrochemical properties of TFSCs are described. (C) 2003 American Vacuum Society. English A V S AMER INST PHYSICS EXCESS OXYGEN All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes Article 10.1116/1.1565348 1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.21, no.3, pp.949 - 952 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 21 3 949 952 scie scopus 000183660800005 2-s2.0-0037780226 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Physics, Applied Engineering Science & Technology - Other Topics Physics Article EXCESS OXYGEN solid state