박재완 박종완 이전국 2024-01-21T09:10:36Z 2024-01-21T09:10:36Z 2022-01-10 2003-03 https://pubs.kist.re.kr/handle/201004/138754 Growth of heteroepitaxial ZnO thin film by off-axis RF magnetron sputtering Off-axis 고주파 마그네트론 스퍼터링법을 이용한 이종에피텍셜 ZnO 박막 성장 Article 3 한국세라믹학회지 = Journal of the Korean Ceramic Society, v.v. 40, no.no. 3, pp.262 - 267 한국세라믹학회지 = Journal of the Korean Ceramic Society v. 40 no. 3 262 267 Heteroepitaxial