임건자 김태은 이종호 김주선 이해원 현상훈 2024-01-21T09:15:26Z 2024-01-21T09:15:26Z 2022-01-10 2003-02 https://pubs.kist.re.kr/handle/201004/138844 Effects of synthetic temperature and suspension stability of CeO₂abrasive on CMP characteristics CeO₂연마입자의 합성온도와 수계안정성이 CMP 특성에 미치는 영향 Article 3 Journal of the Korean Ceramic Society, v.40, no.2, pp.167 - 171 Journal of the Korean Ceramic Society 40 2 167 171 CeO₂ chemical mechanical planarization synthetic temperature suspension stability pH