안세영 이상훈 서상희 김진상 2024-01-21T09:34:44Z 2024-01-21T09:34:44Z 2022-01-10 2003-01 https://pubs.kist.re.kr/handle/201004/138927 The use of an electron cyclotron resonance plasma to fabrication a photovoltaic HgCdTe diode for MWIR detection Electron cyclotron resonance (ECR) plasma를 이용한 중적외선감지용 광전압형 HgCdTe 소자 제작 Article 3 새물리, v.v. 46, no.1, pp.47 - 51 새물리 v. 46 1 47 51 ECR