김인태 박윤권 이시형 이윤희 이전국 김남수 주병권 2024-01-21T09:38:46Z 2024-01-21T09:38:46Z 2022-01-10 2002-12 https://pubs.kist.re.kr/handle/201004/138998 Monolithic film bulk acoustic wave resonator using SOI wafer SOI 웨이퍼를 이용한 압전박막공진기 제작 Article 3 전기전자재료학회논문지 = Journal of the Korean Institute of Electrical and Electronic Material Eng, v.15, no.12, pp.1039 - 1044 전기전자재료학회논문지 = Journal of the Korean Institute of Electrical and Electronic Material Eng 15 12 1039 1044 FBAR piezoelectric SOI MMIC membrane