정귀상 김재민 윤석진 2024-01-21T09:43:00Z 2024-01-21T09:43:00Z 2022-01-10 2002-11 https://pubs.kist.re.kr/handle/201004/139072 Fabrication of 3-Dimensional Microstructures for Bulk Micromachining by SDB and Electrachemical Etch-Stop SDB와 전기화학적 식각정지에 의한 벌크 마이크로머신용 3차원 미세구조물 제작 Article 3 전기전자재료학회논문지, v.15, no.11, pp.958 - 962 전기전자재료학회논문지 15 11 958 962 free-standing microstructure Micromachining SDB SOI Electrachemical etch-stop DRIE