Lee, JH Yoon, KH Kim, TS 2024-01-21T09:43:39Z 2024-01-21T09:43:39Z 2022-01-10 2002-11 1058-4587 https://pubs.kist.re.kr/handle/201004/139084 Micromachined piezoelectric cantilevers have been fabricated using PZT (52/58) films. Electromechanical characteristics of micromachined PZT cantilever were measured by laser vibrometer system as a function of cantilever length for the cantilever with two different supported layer thickness respectively. The 1(st) version unimorph cantilever consists of a 0.6 (square)-thick PZT layer on 1.5 (square)-thick SiN x elastic supported layer. In order to increase Q-factor in air and liquid, from calculated spring constant as a function of variable supporting layer thickness, 2(nd) version cantilever was designed to have a 0.8 (square)-thick PZT layer on 4.5 (square)-thick SiNx/Si elastic supported layer. The gravimetric sensitivities of cantilever in air were characterized by Au deposition on the backside of cantilever. The gravimetric sensitivity of 100x200 (square)-dimension cantilever was 300 cm(2)/g and the mass of 5 ng was detectable. English TAYLOR & FRANCIS LTD THIN-FILM Characterization of resonant behavior and sensitivity using micromachined PZT cantilever Article 10.1080/10584580290172071 1 INTEGRATED FERROELECTRICS, v.50, pp.43 - 52 INTEGRATED FERROELECTRICS 50 43 52 scie scopus 000179831600007 2-s2.0-3843049583 Engineering, Electrical & Electronic Physics, Applied Physics, Condensed Matter Engineering Physics Article; Proceedings Paper THIN-FILM piezoelectric MEMS cantilever PZT electromechanical sensitivity