문성욱 2024-01-21T10:02:25Z 2024-01-21T10:02:25Z 2022-01-10 2002-10 https://pubs.kist.re.kr/handle/201004/139154 Optical MEMS-MEMS 기술의 엑츄에이터 응용 ( Ⅱ )(Projection display 를 중심으로 ) Article 3 월간반도체 = Semiconductor Monthly, v.176, pp.41 - 58 월간반도체 = Semiconductor Monthly 176 41 58 MEMS display projection