최형욱 김경환 김상종 강종윤 안병국 윤석진 2024-01-21T10:06:25Z 2024-01-21T10:06:25Z 2022-01-10 2002-09 https://pubs.kist.re.kr/handle/201004/139224 A study on the ZnO piezoelectric thin films for SAW filter by RF magnetron sputtering RF 마그네트론 스퍼터링에 의한 SAW 필터용 ZnO 압전 박막에 관한 연구 Article 3 전기전자재료학회논문지, v.15, no.9, pp.798 - 807 전기전자재료학회논문지 15 9 798 807 ZnO preferred orientation surface roughness resistivity RF magnetron sputter