문성욱 이억기 2024-01-21T10:35:17Z 2024-01-21T10:35:17Z 2022-01-10 2002-06 https://pubs.kist.re.kr/handle/201004/139476 MEMS optical switch 의 개발 Article 3 Semiconductor Monthly, v.172, pp.76 - 77 Semiconductor Monthly 172 76 77 optical switch