Kim, MC Choi, JW Yoon, SJ Yoon, KH Kim, HJ 2024-01-21T10:37:13Z 2024-01-21T10:37:13Z 2021-09-01 2002-06 0021-4922 https://pubs.kist.re.kr/handle/201004/139511 The films of nominal composition Pb(Zr0.52Ti0.48)O-3 (PZT) in the thickness range of 0.4-6.0 mum were fabricated on Pt/Ti/SiO2/Si substrate using a pulsed laser deposition (PLD). The PZT films were deposited in a single process at 500degreesC and post annealed at 650degreesC in oxygen atmosphere. The variations in preferred orientation and microstructure were determined as a function of film thickness. The transition of preferred orientation and microstructure influenced dielectric property. Ferroelectric and dielectric properties were maximized at the film thickness of 2.0 mum. The maximum values of remnant polarization and dielectric constant were 38 mummuC/cm(2) and 1380, respectively. English JAPAN SOC APPLIED PHYSICS TITANATE THIN-FILMS LEAD-ZIRCONATE STABILITY ABLATION QUALITY Thickness dependence of Pb(Zr0.52Ti0.48)O-3 films prepared by pulsed laser deposition Article 10.1143/JJAP.41.3817 1 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.41, no.6A, pp.3817 - 3821 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 41 6A 3817 3821 scie scopus 000177169500040 Physics, Applied Physics Article TITANATE THIN-FILMS LEAD-ZIRCONATE STABILITY ABLATION QUALITY Pb(Zr0.52Ti0.48)O-3 pulsed laser deposition single process preferred orientation microstructure dielectric properties