Park, HM Kim, YM Cheong, CS Ryu, JC Lee, DW Lee, KB 2024-01-21T11:00:55Z 2024-01-21T11:00:55Z 2021-09-04 2002-04 0910-6340 https://pubs.kist.re.kr/handle/201004/139673 English JAPAN SOC ANALYTICAL CHEMISTRY Origin of trace organic contaminants adsorbed on the surface of silicon wafers in a manufacturing line Article 10.2116/analsci.18.477 1 ANALYTICAL SCIENCES, v.18, no.4, pp.477 - 479 ANALYTICAL SCIENCES 18 4 477 479 scie scopus 000174953300019 2-s2.0-0036235518 Chemistry, Analytical Chemistry Article silicon wafers anion analysis ion chromatography environmental analysis