한준희 이광렬 김광석 이상율 2024-01-21T11:02:46Z 2024-01-21T11:02:46Z 2022-01-10 2002-03 https://pubs.kist.re.kr/handle/201004/139706 Principal and applications of nanoindentation test 나노 인덴테이션 시험의 원리 및 응용 Article 3 한국정밀공학회지 = Journal of the Korean Society of Precision Engineering, v.19, no.3, pp.19 - 26 한국정밀공학회지 = Journal of the Korean Society of Precision Engineering 19 3 19 26 nanoindentation thin film hardness elastic modulus DLC polyimide MEMS