Kim, KH Jeong, JH Kim, J Han, SH Kim, HJ 2024-01-21T11:08:52Z 2024-01-21T11:08:52Z 2021-09-05 2002-02 0304-8853 https://pubs.kist.re.kr/handle/201004/139815 As-sputtered Fe-B-N films have been prepared by a reactive RF magnetron sputtering method at 450 W input power. Fe-B-N films exhibit that 4piM(S) and H-c,H-hard is 16.7-20.8 kG and 0.15-30 Oe, respectively. In addition, the frequency dependence of permeabilities is maintained between 100 and 500 MHz. Fe91.6B2.5N5.9 film exhibits that 4piMHz is 19.5 kG, mu' similar to 4600(100 MHz). Also Fe85.9B2.6N11.5 film shows excellent high frequency characteristics up to 500 MHz (mu' = 1000) with high 4piM(s) similar to 18 kG. The corrosion resistance of these films is better than that of FeXN (X = Hf, Ti, etc.) films. (C) 2002 Published by Elsevier Science B.V. English ELSEVIER SCIENCE BV THIN-FILMS HF High moment and high frequency permeability Fe-B-N nanocrystalline soft magnetic films Article 10.1016/S0304-8853(01)00667-9 1 JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, v.239, no.1-3, pp.487 - 489 JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS 239 1-3 487 489 scie scopus 000175187300144 2-s2.0-0036465677 Materials Science, Multidisciplinary Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper THIN-FILMS HF nanocrystalline permeability high frequency