Na, SM Suh, SJ Kim, HJ Lim, SH 2024-01-21T11:10:14Z 2024-01-21T11:10:14Z 2021-09-04 2002-02 0304-8853 https://pubs.kist.re.kr/handle/201004/139840 The change in the residual stress and its effect on mechanical bending and magnetic properties of sputtered amorphous Sm-Fe-B thin films are investigated as a function of annealing temperature. Two stress components of intrinsic compressive stress and tensile stress due to the difference of the thermal expansion coefficients between the substrate and thin film are used to explain the stress state in as-deposited thin films, and the annealing temperature dependence of residual stress. mechanical bending and magnetic properties. (C) 2002 Elsevier Science B.V. All rights reserved. English ELSEVIER ANISOTROPY Residual stress change by thermal annealing in amorphous Sm-Fe-B thin films Article 10.1016/S0304-8853(01)00668-0 1 JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, v.239, no.1-3, pp.570 - 572 JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS 239 1-3 570 572 scie scopus 000175187300167 2-s2.0-0036465325 Materials Science, Multidisciplinary Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper ANISOTROPY giant magnetostriction thin films residual stress thermal annealing magnetoelastic anisotropy