이철승 신진국 김종국 이광렬 윤기현 2024-01-21T11:11:26Z 2024-01-21T11:11:26Z 2022-01-10 2002-01 https://pubs.kist.re.kr/handle/201004/139859 The control of the structure and properties of tetrahedral amorphous carbon films prepared by filtered vacuum arc FVA 증착법에 의해 합성된 ta-C 박막의 구조 및 물성 제어 Article 3 Journal of the Korean Vacuum Society = 한국진공학회, v.11, no.1, pp.8 - 15 Journal of the Korean Vacuum Society = 한국진공학회 11 1 8 15 ta-C